Product Details Portlet

D6F-P MEMS Flow Sensor

A Compact, High-accuracy Flow Sensor with Superior Resistance to Environments.

  • Anti-dust performance is improved using the Cyclon method.
  • A full lineup of models with different connector types: barb joints, lead terminals for direct mounting on-board, and manifolds.
  • High accuracy of ±5% FS.
RoHS適合
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MEMS Flow Sensor
Flow Port Type
Connection
Applicable fluid
Flow rate range
Model
Bamboo jointLead terminalsAir0 to 0.1 L/min.D6F-P0001A1
0 to 1 L/min.D6F-P0010A1
ConnectorD6F-P0010A2
ManifoldD6F-P0010AM2

Accessory(Sold separately)
Type
Model
CableD6F-CABLE2
D6F-CABLE2-L
Note:Refer to Accessories for the D6F Series on page 39.
Characteristics/Performance
Model
D6F-P0001A1
D6F-P0010A1
D6F-P0010A2
D6F-P0010AM2
Flow Range (See note 1.)0 to 0.1 L/min0 to 1 L/min
Calibration Gas (See note 2.)Air
Flow Port TypeBarb joint
Maximum outside diameter: 4.9 mm
Manifold
Electrical ConnectionLead terminalsThree-pin connector
Power Supply4.75 to 5.25 VDC
Current Consumption15 mA max. with no load and a Vcc of 5.0 V
Output Voltage0.5 to 2.5 VDC (Load resistance: 10 kΩ)
Accuracy±5% FS (25°C characteristic)
Repeatability (See note 3.)±1.0% FS±0.4% FS
Output Voltage (Max.)3.1 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage10 VDC
Rated Output Voltage4 VDC
CasePBT
Degree of ProtectionIEC IP40 (Excluding tubing sections.)
Withstand Pressure50 kPa
Pressure Drop (See note 3.)0.005 kPa0.19 kPa0.67 kPa
Operating Temperature (See note 4.)−10 to 60°C
Operating Humidity (See note 4.)35% to 85%
Storage Temperature (See note 4.)−40 to 80°C
Storage Humidity (See note 4.)35% to 85%
Temperature Characteristics±5% FS for 25°C characteristic at an ambient temperature of -10 to 60°C
Insulation ResistanceBetween Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric StrengthBetween Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight8.5 g8.0 g
Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
Note: 4. With no condensation or icing.

(Unit :mm)

PCB Terminals
D6F-P0001A1/D6F-P0010A1


Detailed View of A
Recommended Dimensions for
Connector Mounting Holes (Bottom view)



Connectors
D6F-P0010A2


Detailed View of A


D6F-P0010AM2
Detailed View of A
Grooves to stop rotation



Detailed View of B
Connector Details



Pin No.1: Vcc

2: Vout

3: GND
Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.)
Note:Use the following connectors from J.S.T. Mfg. Co., Ltd. to connect the D6F.
1) Pressure-welded connectorsSocket:03SR-3S

Wires:AWG#30 or
2) Crimp connectorsContacts:SSH-003T-P0.2

Wires:AWG#32 to #28

Housing:SHR-03V-S
Tubes
Install tubes made of materials such as rubber or urethane so that they will not come out. For urethane tubes, tubes with an outer diameter of 6 mm and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100 gf max. (This applies only to PCB-mounting Sensors.)



Precautions for Correct Use

Sensor Applications

The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation would directly affect human life.

Fluids, Pipe Mounting and Sensor Installation

All D6F Models
(1) Use clean fluids. Install a filter or mist separator on the inflow pipe. Failure to do so may result in malfunction or changes in characteristics due to dust or mist. This does not apply to the D6F-W, D6F-V, D6F-P and D6F-PH.
(2) Do not use corrosive gases other than the specified applicable fluids (such as chlorine, sulfur, acid,or alkali) . Doing so may cause product failure.
(3) The specified performance may not be obtained if the D6F is used for fluids other than the specified applicable fluids.
(4) After removing the Sensor from the package, do not allow foreign particles to enter the piping. Foreign particles in the piping may cause product failure.
(5) Install the Sensor so that the fluid flows in the direction indicated by the arrow on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. This does not apply to the D6F-V, D6F-P and D6F-PH.
(6) It is recommended that the Sensor (except for the D6F-A3) be mounted horizontally. If it is not mounted horizontally, an error of ±1% FS or higher may result.
(7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements.
(8) Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation.
(9) Always check operation after installation.
(10) Do not drop the Sensor or disassemble the cover.

D6F-P0001A1/-P0010A1/-P0010A2
(1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction from the positive side (+) to the negative side (-). Refer to the figure on page 26 for the installation direction.
(3) For PCB-mounting Sensors, perform terminal soldering only after the Sensor is secured into place on the PCB. Use a soldering iron for 5 s at 350°C with a pressure of 100 gf max. (This applies only to PCB-mounting Sensors.)
(4) Use M2.6 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.59 N•m.

D6F-P0010AM2
(1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction from the positive side (+) to the negative side (-). Install the Sensor with the manifold facing downward. Refer to the figure on page 26 for the installation direction.
(3) Use M3 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.59 N•m.
(4) Install O-rings to seal the fluid inlet and outlet points. The recommended O-ring is JIS B 2401, nominal number P4.
 

Operating Environment

Do not use the Sensor in the following locations:
•Locations directly subject to heat radiated from heating equipment
•Locations subject to water or oil
•Locations subject to direct sunlight
•Locations subject to intense temperature changes
•Locations subject to icing or condensation
•Locations subject to excessive vibration or shock
 

Countermeasures against Noise

Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
•Allow as much space as possible between the Sensor and devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges.
•Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils).
(It also helps to separate pipes and ducts, and to use shielded cables.)
 

Power Supply

•Force of connector terminal is 20 N max. Do not add strength more than tension of wire bending to connector at wiring. Install the connector coaxially to the fitting axis with holding all wires. And pulling angle should be within 15 degrees.
•Use the applicable connectors. Directly soldering the connection terminals will cause product failure. (except for the D6F-PH)
•Check the terminal names and polarity and wire the power supply correctly. Incorrect wiring will cause failure of internal components.
•When using a commercially available switching regulator, ground
the FG (frame ground) and G (ground) terminals.
 

Handling

The sensor is a precision device, and if large shock and load is applied, it may cause a failure or characteristic change. Please do not use the sensor which is added excessive shock to the terminals, discompose the cover, or has fallen.
•The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions
 

RoHS Directive

The RoHS mark is displayed on the packing of products for which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic components mounted to the PCBs).
* RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.

RoHS Compliance Criteria

The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not given.)
•Lead: 1,000 ppm max.
•Hexavalent chromium: 1,000 ppm max.
•Mercury: 1,000 ppm max.
•PBB: 1,000 ppm max.
•Cadmium: 100 ppm max.
•PBDE: 1,000 ppm max.